MEMS synthesis and optimization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 159-164

  Juneidi, Z ^a   Torki, K ^a   Charlot, B ^a   Courtois, B ^a  

^a TIMA LABORATORY   (France)

Author keywords

CAD tools; HDLA; MEMS synthesis; Optimization

Indexed keywords

ACCELEROMETERS; ALGORITHMS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; FINITE ELEMENT METHOD; GYROSCOPES; MICROMACHINING; OPTIMIZATION; THERMOPILES; TOPOLOGY;

MICROELECTROMECHANICAL SYSTEM (MEMS) SYNTHESIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034866613     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425364     Document Type: Conference Paper

References (7)

1. Structured design methods for MEMS
2. Parameterized layout synthesis, extraction, and SPICE simulation for MEMS
3. Structured design of microelectromechanical systems
4. Automated optimal synthesis of microresonators
5. Multi-mode sensitive layout synthesis of microresonators