Extraction of heat-transfer macromodels for MEMS devices

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 587-596

  Yang, Yao Joe ^a   Yu, Che Chia ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; FEEDBACK; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; HEAT TRANSFER; MATHEMATICAL MODELS; RESISTORS; THERMOANALYSIS;

CIRCUIT SIMULATIONS; MACROMODELS; SUBSYSTEMS; SYSTEM LEVEL MODELING;

MICROELECTROMECHANICAL DEVICES;

EID: 2342517503     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/020     Document Type: Article

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