Automated surface micro-machining mask creation from a 3D model

Microsystem Technologies

Volumn 12, Issue 3, 2006, Pages 204-207

  Schiek, Richard L ^a   Schmidt, Rodney C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Design; Mask; Mems; Optimization; Topology

Indexed keywords

DESIGN; MATHEMATICAL MODELS; MICROMACHINING; OPTIMIZATION; TOPOLOGY; TREES (MATHEMATICS);

CONSTRAINED OPTIMIZATION; MEMS; SURFACE MICRO-MACHINING; VERTICAL TOPOLOGY;

MASKS;

EID: 31144436826     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0049-z     Document Type: Article

References (4)

1. Cho S, Lee K, Kim T (2002) Development of a geometry-based process planning system for surface micromachining. Int J Prod Res 40(5): 1275-1293
2. Jorgensen C, Yarberry V (2001) A 3D geometry modeler for the SUMMIT V MEMS designer. Model Simul Microsyst 594-597
3. Ma L, Antonsson E (2003) Robust mask-layout and process synthesis. J Microelectromech Syst 12(5):728-729
4. Venkataraman V, Sarma R, Ananthasuresh S (2000) Part to art: basis for a systematic geometric design tool for surface micromachined MEMS. In: Proceedings of the ASME Design Engineering Technical Conferences, pp 1-14