Automated mask-layout and process synthesis for MEMS

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 20-23

  Ma, L ^a   Antonsson, Erik K ^a,b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Mail Code: 104 44 ^*  (United States)

Author keywords

Bulk wet etching; Design; Genetic algorithm; MEMS; Synthesis

Indexed keywords

COMPUTER SIMULATION; ETCHING; GENETIC ALGORITHMS; INTEGRATED CIRCUIT LAYOUT; ITERATIVE METHODS; MASKS; PROBLEM SOLVING; RANDOM PROCESSES;

BULK WET ETCHING; ITERATION LOOPS; MECHANICAL DEVICES; POLYGONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0003741877     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Esther M. Arkin, L. Paul Chew, Daniel P. Huttenlocher, Klara Kedem, and Joseph S. B. Mitchell. An efficiently computable metric for comparing polygonal shapes. IEEE Transactions on Pattern Analysis and Machine Intelligence, 13:209-215, 1991.
2. James E. Baker. Adaptive selection methods for genetic algorithm. In John Grefenstette, editor, Proceedings of the International Conference on Genetic Algorithms and Their Applications, pages 101-111, 1985.
3. David E. Goldberg. Genetic Algorithms in Search, Optimization, and Machine Learning. Addison-Wesley, 1989.
4. John J. Grefenstette and James E. Baker. How genetic algorithms work: A critical look at implicit parallelism. In The Third International Conference on Genetic Algorithms, 1989.
5. John H. Holland. Adaptation in Natural and Artificial Systems. The University of Michigan Press, 1975.
6. Ted J. Hubbard and Erik K. Antonsson. Design of MEMS via Efficient Simulation of Fabrication. In Design for Manufacturing Conference. ASME, August 1996.
7. Hui Li and Erik K. Antonsson. Mask-Layout Synthesis Through an Evolutionary Algorithm. In MSM'99, Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, San Juan, Puerto Rico, April 1999. IEEE.