Reliability of electrostatically actuated RF MEMS switches

RFIT 2007 - IEEE International Workshop on Radio-Frequency Integration Technology

Volumn , Issue , 2007, Pages 168-171

  Hwang, James C M ^a  

^a LEHIGH UNIVERSITY   (United States)

Author keywords

Charge injection; Contacts; Dielectric films; Dielectric materials; Microelectromechanical devices; Ohmic contacts; Switches

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; INTEGRATION; MEMS; MICROELECTROMECHANICAL DEVICES; TECHNOLOGY;

CAPACITIVE SWITCHING; CHARGE INJECTION; CONTACTS; DIELECTRIC CHARGING; DIELECTRIC FILMS; DIELECTRIC INSULATORS; DIELECTRIC MATERIALS; INTEGRATION TECHNOLOGIES; OHMIC CONTACTS; OHMIC SWITCHES; RADIO FREQUENCIES; RF-MEMS SWITCHES; SWITCHES;

ELECTRIC SWITCHES;

EID: 49949098048     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RFIT.2007.4443942     Document Type: Conference Paper

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