Dielectric less capacitive MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 2004, Pages 573-576

  Blondy, Pierre ^a   Crunteanu, Aurelian ^a   Champeaux, Corinne ^a   Catherinot, Alain ^a   Tristant, Pascal ^a   Vendier, Olivier ^b   Cazaux, Jean Louis ^b   Marchand, Laurent ^c  

^a UNIVERSITY OF LIMOGES   (France)

^b THALES ALENIA SPACE   (France)

^c EUROPEAN SPACE AGENCY   (Netherlands)

Author keywords

Reliability; RF MEMS

Indexed keywords

MICRO MECHANICAL RESONATORS; SPACEBORNE SYSTEMS;

CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC CHARGE; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRONICS PACKAGING; FABRICATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RELIABILITY; RESONATORS; SEMICONDUCTING GALLIUM ARSENIDE; SENSITIVITY ANALYSIS;

ELECTRIC SWITCHES;

EID: 4444368772     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. C. Goldsmith, T.H. Lin, B. Powers, W.R. Wu, And B. Norwell, "Micromechanical membrane switches formicrowave applications", IEEE MTT-S Digest, 1995, pp 91-94.
2. Goldsmith, C.; Ehmke, J.; Malczewski, A.; Pillans, B.; Eshelman, S.; Yao, Z.; Brank, J.; Eberly, M., "Lifetime characterization of capacitive RF MEMS switches", IEEE Int. Microwave Symp. Dig, 2001 Volume: 1, 20-25 May 200l,page(s): 227-230 vol.1
3. James R. Reid "Dielectric Charging E□ects on Capacitive MEMS Actuators", IEEE Int. Microwave Symp., 2002, Workshop WMN
4. D. Peroulis, "RF-MEMS Devices for multifunctionnal integrated circuits and antennas" PhD Dissertation, University of Michigan, Ann Arbor, USA 2003.
5. J.B. Muldavin, R. Boisvert, C. Bozler, S. Rabe, C. Keast,"Power handling and linearity of MEM capacitive series switches", IEEE Int. Microwave Symp. Dig., vol3, p 2119-2122
6. Dussopt, L.; Rebeiz, G.M., "An X- to ku-band 3-bit digital MEMS varactor", IEEE Microwave and Wireless Components Letters, Volume: 13 Issue: 9, Sept. 2003 Page(s): 361 -363
7. Nguyen, C.T.-C., "Transceiver front-end architectures using vibrating micromechanical signal processors", Silicon Monolithic Integrated Circuits in RF Systems, 2001. Digest. 2001, 12-14 Sept. 2001, Page(s): 23 -32
8. http://www.microchem.com
9. Muldavin, J.B.; Rebeiz, G.M. "Nonlinear electromechanical modeling of MEMS switches", IEEE Int. Microwave Symp. Dig., Volume: 3, 20-25 May 2001 Page(s): 2119-2122 vol.3
10. Momentum, Agilent Technologies.
11. G.M. Rebeiz, RF-MEMS theory, design, and technology New York: J. Wiley & Sons, 2003.