RF power handling of capacitive RF MEMS devices

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2002, Pages 329-332

  Pillans, B ^a   Kleber, J ^a   Goldsmith, C ^b   Eberly, M ^a  

^a RAYTHEON COMPANY   (United States)

^b Cogent Solutions Inc ^*  (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER SUPPLIES TO APPARATUS; FREQUENCIES; INSERTION LOSSES; RELIABILITY; SWITCHING SYSTEMS; THRESHOLD VOLTAGE; VOLTAGE MEASUREMENT; WAVEGUIDES;

MICROWAVE FREQUENCIES; POWER CONSUMPTION; POWER HANDLING;

MICROELECTROMECHANICAL DEVICES;

EID: 0036070432     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2002.1011623     Document Type: Article

References (6)

1. Micromechanical membrane switches on silicon
2. A micro variable inductor chip using MEMS relays
3. Micromachined microwave actuator technology - A new tuning approach for microwave integrated circuits
4. Performance of low loss RF MEMS capacitive switches
5. Lifetime characterization OF capacitive RF MEMS switches
6. High-isolation CPW MEMS shunt switches. 1. Modeling