Carbon nanotube based dielectric for enhanced RF MEMS reliability

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 375-378

  Bordas, Chloé ^a   Grenier, Katia ^a   Dubuc, David ^a   Flahaut, Emmanuel ^b   Pacchini, Sébastien ^a   Paillard, Mathieu ^c   Cazaux, Jean Louis ^c  

^a LAAS CNRS   (France)

^b INSTITUT CARNOT CIRIMAT   (France)

^c THALES ALENIA SPACE   (France)

Author keywords

Carbon nanotube; Dielectric charging; Reliability; RF MEMS; Switches

Indexed keywords

CURRENT DENSITY; DIELECTRIC PROPERTIES; ELECTRIC SWITCHES; MEMS; RELIABILITY; SILICON NITRIDE;

DIELECTRIC CHARGING; DOUBLE WALL NANOTUBES (DWNT);

MULTIWALLED CARBON NANOTUBES (MWCN);

EID: 34748918996     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380449     Document Type: Conference Paper

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