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Volumn , Issue , 2006, Pages 538-541

Electro-thermally activated polymeric stack for linear in-plane actuation

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM CLADDING; LIGHT METALS; NONMETALS; SENSORS; SILICON; THERMAL CONDUCTIVITY; THERMAL SPRAYING;

EID: 49149112353     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355524     Document Type: Conference Paper
Times cited : (7)

References (14)
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  • 2
    • 24144482735 scopus 로고    scopus 로고
    • An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives
    • J. P. Yang, X. C. Deng and T. C. Chong, "An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives," J. Micromech. Microeng., vol. 15, pp. 958-965, 2005.
    • (2005) J. Micromech. Microeng , vol.15 , pp. 958-965
    • Yang, J.P.1    Deng, X.C.2    Chong, T.C.3
  • 3
    • 2942677002 scopus 로고    scopus 로고
    • Variable optical attenutor using a thermal actuator array with dual shutters
    • J. C. Chiou, W. T. Lin, "Variable optical attenutor using a thermal actuator array with dual shutters," Opt. Communications, vol. 237, pp. 341-350, 2004.
    • (2004) Opt. Communications , vol.237 , pp. 341-350
    • Chiou, J.C.1    Lin, W.T.2
  • 5
    • 26844529198 scopus 로고    scopus 로고
    • An electro-mechanical material testing system for in situ electron microscopy and applications
    • Y. Zhu and H. D. Espinosa, "An electro-mechanical material testing system for in situ electron microscopy and applications," Proc. Natl Acad. Sci., vol. 102, pp. 14503-8, 2005.
    • (2005) Proc. Natl Acad. Sci , vol.102 , pp. 14503-14508
    • Zhu, Y.1    Espinosa, H.D.2
  • 6
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    • The characterization of thermal and elastic constant for an epoxy photoresist SU8 coating
    • R. Feng and R. J. Farris, "The characterization of thermal and elastic constant for an epoxy photoresist SU8 coating," J. Mater. Sci., vol. 27, pp. 4793-4799, 2002.
    • (2002) J. Mater. Sci , vol.27 , pp. 4793-4799
    • Feng, R.1    Farris, R.J.2
  • 7
    • 3142664529 scopus 로고    scopus 로고
    • A polymeric microgripper with integrated thermal actuators
    • N.-T. Nguyen, S.-S. Ho and C. L.-N. Low, "A polymeric microgripper with integrated thermal actuators," J. Micromech. Microeng., vol. 14 pp. 969-974, 2004.
    • (2004) J. Micromech. Microeng , vol.14 , pp. 969-974
    • Nguyen, N.-T.1    Ho, S.-S.2    Low, C.L.-N.3
  • 8
    • 27144488401 scopus 로고    scopus 로고
    • Electrothermally activated SU-8 microgripper for single cell manipulation in solution
    • N. Chronis and L. P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution," J. Microelectromech. Syst., vol. 14, pp. 857-863, 2005.
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  • 13
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    • Scanning micromirrors Fabricated by an SOI/SOI wafer-bonding process
    • L. Zhou, J. M. Kahn., and K. S. J. Pister, "Scanning micromirrors Fabricated by an SOI/SOI wafer-bonding process," J. Microelectromech. Syst., vol. 15, pp. 24-32, 2006
    • (2006) J. Microelectromech. Syst , vol.15 , pp. 24-32
    • Zhou, L.1    Kahn, J.M.2    Pister, K.S.J.3
  • 14
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    • A 'nano-battering ram' for measureing surface forces
    • 3-5 September
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.