An in-plane thermal unimorph using confined polymers

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages

  Lau, G K ^a   Duc, T Chu ^b   Goosen, J F L ^a   Sarro, P M ^b   Van Keulen, F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; SILICON COMPOUNDS; STIFFNESS; THERMAL EXPANSION;

CONFINED POLYMERS; IN PLANE THERMAL UNIMORPH; POLYMER FILLING; SILICON SKELETON;

CANTILEVER BEAMS;

EID: 34547591640     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/S15     Document Type: Article

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