Actuated elastomers with rigid vertical electrodes

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Lau, G K ^a   Goosen, J F L ^a   Van Keulen, F ^a   French, P J ^b   Sarro, P M ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Electronic Instrumentation Laboratory   (Netherlands)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ENERGY GAP; NUMERICAL ANALYSIS; ROBUSTNESS (CONTROL SYSTEMS);

ELECTROSTATIC COMB DRIVES; ELECTROSTATIC FORCES; VERTICAL STANDING ELECTRODES;

ELASTOMERS;

EID: 34247593982     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S07     Document Type: Article

References (15)

1. Pelrine R E, Kornbluh R D and Joseph J P 1998 Electro-striction of polymer dielectrics with compliant electrodes as a means of actuation Sensors Actuators A 64 77-85
2. Schlaak H F, Jungmann M, Matysek M and Lotz P 2005 Novel multilayer electrostatic solid-state actuators with elastic dielectric Proc. SPIE 5759 121-33
3. Benslimane M, Gravesen P and Sommer-Larsen P 2002 Mechanical properties of dielectric elastomer actuators with smart metallic compliant electrodes Proc. SPIE 4695 150-7
4. Pimpin A, Suzuki Y and Kasagi N 2004 Micro electro-strictive actuator with metal compliant electrodes for flow control applications Proc. 17th IEEE Int. Conf. on Micro Electro Mechanical Systems pp 478-81
5. Pelrine R, Kornbluh R, Joseph J, Heydt R, Pei Q B and Chiba S 2000 High-field deformation of elastomeric dielectrics for actuators Mater. Sci. Eng. C 11 89-100
6. Gent A N and Lindley R B 1959 The compression of bonded rubber blocks Proc. Inst. Mech. Eng. 173 111-22
7. Lindley R B 1966 Load-compression relationships of rubber units J. Strain Anal. 1 190-5
8. Senturia S D 2001 Microsystem Design (Dordrecht: Kluwer) pp 134-7
9. Timoshenko S P 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11 233-55
10. ANSYS Inc. ANSYS Element Reference, Release 8.1, Canonsburg
11. Panofsky W K H and Phillips M 1962 Energy relationship and force in the electrostatic field Classical Electricity and Magnetism 2nd edn (Reading, MA: Addison-Wesley) chapter 6
12. eFunda Engineering Materials 2005 http://www.efunda.com/materials/ materials_home/materials.cfm
13. Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9
14. Ono T, Sim D Y and Esashi M 2000 Micro-discharge and electric breakdown in a micro-gap J. Micromech. Microeng. 10 445-51
15. Kim K, Park S, Lee J-B, Manohara H, Desta Y, Murphy M and Ahn C H 2002 Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology Microsyst. Technol. 9 5-10