Reactive Magnetron Sputter Deposition of Niobium Nitride Films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 4, 1993, Pages 1528-1533

  Wong, M S ^a   Sproul, W D ^a   Chu, X ^a   Barnett, S A ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 71849095596     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578696     Document Type: Conference Paper

References (18)

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