Magnetron sputtered NbN thin films and mechanical properties

Surface and Coatings Technology

Volumn 179, Issue 2-3, 2004, Pages 188-192

  Han, Zenghu ^a   Hu, Xiaoping ^a   Tian, Jiawan ^a   Li, Geyang ^a   Mingyuan, Gu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Mechanical properties; Microstructure; NbN thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; MAGNETRON SPUTTERING; MICROHARDNESS; NIOBIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PARTIAL PRESSURES;

THIN FILMS;

FILM THICKNESS; SPUTTERING;

EID: 1342265738     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00848-X     Document Type: Article

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