High-temperature tribological behaviour of sputtered NbNx thin films

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 1017-1022

  Fontalvo, G A ^a   Terziyska, V ^a   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

Author keywords

High temperature; Lubricious oxide; NbN; Wear

Indexed keywords

CRYSTAL STRUCTURE; FRICTION; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; THIN FILMS; WEAR RESISTANCE;

LUBRICIOUS OXIDE; SUBSTRATE BIAS POTENTIAL;

TRIBOLOGY;

CRYSTAL STRUCTURE; FRICTION; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE;

EID: 36148970066     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.07.043     Document Type: Article

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