Fabrication of high aspect ratio metal nanotips by nanosecond pulse laser melting

Nanotechnology

Volumn 19, Issue 34, 2008, Pages

  Cui, Bo ^a   Wu, Lin ^b   Chou, Stephen Y ^a  

^a Princeton University   (United States)

^b UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHROMIUM; EXCIMER LASERS; FLUID MECHANICS; GALLIUM ALLOYS; GAS LASERS; LASER PULSES; LASERS; METAL MELTING; METALS; NANOSTRUCTURES; NANOTIPS; OPTICAL DESIGN; OXIDE MINERALS; PHOTORESISTS; PLANTS (BOTANY); PRESSURE DROP; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; QUARTZ; THICKNESS MEASUREMENT;

CLOSE PROXIMITY; CR FILMS; EXCIMER; HIGH ASPECT RATIO (HAR); METAL TIPS; NANOSECOND PULSES; PRE-PATTERNING; PULSE DURATION (PD); SELF FORMATION; SUB MICROMETERS; WORK-FUNCTION DIFFERENCE;

SMELTING;

CHROMIUM; METAL;

ARTICLE; FIELD EMISSION; FILM; LASER; MELTING POINT; NANOANALYSIS; PRIORITY JOURNAL; SCANNING PROBE MICROSCOPY;

EID: 48249093482     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/34/345303     Document Type: Article

References (30)

1. Jeong T et al 2006 J. Appl. Phys. 100 064308
2. Nguyen C V, Ye Q and Meyyappan M 2005 Meas. Sci. Technol. 16 2138
3. Chen I C, Chen L H, Ye X R, Daraio C, Jin S, Orme C A, Quist A and Lal R 2006 Appl. Phys. Lett. 88 153102
4. Tang Y, Cong H, Chen Z and Cheng H 2005 Appl. Phys. Lett. 86 233104
5. Thomas R N, Wickstrom R A, Schrodder D K and Nathanson H C 1974 Solid-State Electron. 17 155
6. Ding M, Sha G and Akinwande A I 2002 IEEE Trans. Electron Devices 49 2333
7. Rangelow I W and Biehl S 2001 Microelectron. Eng. 57/58 613
8. Akiyama K, Eguchi T, An T, Fujikawa Y, Yamada-Takamura Y, Sakurai T and Hasegawa Y 2005 Rev. Sci. Instrum. 76 033705
9. Kim P, Kim J H, Jeong M S, Ko D K, Lee J and Jeong S 2006 Rev. Sci. Instrum. 77 103706
10. Spindt C A 1968 J. Appl. Phys. 39 3504
11. Losic D, Shapter J G, Mitchell J G and Voelcker N H 2005 Nanotechnology 16 2275
12. Zou J, Wang X, Bullen D, Ryu K, Liu C and Mirkin C A 2004 J. Micromech. Microeng. 14 204
13. Steen J A, Hayakawa J, Harada T, Lee K, Calame F, Boero G, Kulik A J and Brugger J 2006 Nanotechnology 17 1464
14. Liao Y S and Chen Y T 2005 J. Micromech. Microeng. 15 2433
15. Cho K J, Ryu J T and Lee S Y 2003 Solid-State Electron. 47 633
16. Chou S Y, Keimel C and Gu J 2002 Nature 417 835
17. Xia Q, Keimel C, Ge H, Yu Z, Wu W and Chou S Y 2003 Appl. Phys. Lett. 83 417
18. Le Drogoff B, Cui B and Veres T 2006 Appl. Phys. Lett. 89 113103
19. Cui B, Wu W, Keimel C and Chou S Y 2006 Microelectron. Eng. 83 1547
20. Bauerle D 2000 Laser Processing and Chemistry 3 edn (Berlin: Springer)
21. Allmen M and Blatter A 1995 Laser-beam Interactions with Materials-Physical Principles and Applications (Springer Series in Materials Science) 2nd edn (Berlin: Springer)
22. Yaws C L 1998 Chemical Properties Handbook: Physical, Thermodynamics, Environmental Transport, Safety and Health Related Properties for Organic and Inorganic Chemicals (New York: McGraw-Hill)
23. Berry R, Hall P and Harris M 1968 Thin Film Technology (Princeton, NJ: Van Nostrand)
24. Chou S Y and Zhuang L 1999 J. Vac. Sci. Technol. B 17 3197
25. Chou S Y, Zhuang L and Guo L J 1999 Appl. Phys. Lett. 75 1004
26. Schaffer E, Thurn-Albrecht T, Russell T P and Steiner U 2000 Nature 403 874
27. Pease L F and Russel W B 2002 J. Non-Newton. Fluid Mech. 102 233
28. Wu L and Chou S Y 2003 Appl. Phys. Lett. 82 3200
29. Wu L and Chou S Y 2005 J. Non-Newton. Fluid Mech. 125 91
30. Wu L 2008 J. Appl. Phys. 104 at press