Filling of nano-via holes by laser-assisted direct imprint

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1547-1550

  Cui, Bo ^a   Wu, Wei ^a   Keimel, Chris ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

LADI; Nanofabrication; Nanoimprint; Pulsed excimer laser; Step coverage; Via filling

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; LASER PULSES; MIRRORS;

LADI; NANOIMPRINT; PULSED EXCIMER LASER; STEP COVERAGE;

NANOTECHNOLOGY;

EID: 33646065676     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.087     Document Type: Article

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