Precision fabrication of an arrayed micro metal probe by the laser-LIGA process

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2433-2440

  Liao, Yunn Shiuan ^a   Chen, Ying Tung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DEPOSITION; EXCIMER LASERS; GLASS; LASER APPLICATIONS; LASER BEAM EFFECTS; METAL ANALYSIS; METAL CASTING;

GLASS SUBSTRATE; METAL PROBES; MICROMETAL; PRECISION TUNING;

MICROMACHINING;

EID: 27944440011     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/027     Document Type: Article

References (16)

1. Davis S P, Prausnitz M R and Allen M G 2003 Fabrication and characterization of laser micromachined hollow microneedles IEEE Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystem pp 1435-8
2. Paik S J, Lim J M, Jung I, Park Y H, Byun S, Chung S, Chun K, Chang J and Cho D D 2003 A novel microneedle array integrated with a PDMS biochip for microfluid systems IEEE Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystem pp 1446-9
3. Chen L and El-Gomati M M 1999 Field emission studies of tungsten-coated silicon-based field emitters Ultramicroscopy 79 135-40
4. Shikida M, Ando M, Ishihara Y, Ando T, Sato K and Asaumi K 2004 Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures J. Micromech. Microeng. 14 1462-7
5. Aggarwal P, Kaler K V I S and Badawy W 2003 Design and implementation of MEMS based microneedles for biomedical applications IEEE Proc. Canadian Conf. on Electrical and Computer Engineering pp 1505-8
6. Chandrasekaran C and Frazier A B 2003 Characterization of surface micromachined hollow metallic microneedles IEEE J. Microelectromech. Syst. 12 289-95
7. Lin L and Pisano A P 1999 Silicon-processed microneedles IEEE J. Microelectromech. Syst. 8 78-84
8. Gardeniers H J G E, Luttg R, Berenschot E J W, de Boer M J, Yeshurun S Y, Hefetz M, van't Oever R and van den Berg A 2003 Silicon micromachined hollow microneedles for transdermal liquid transport IEEE J. Microelectromech. Syst. 12 855-62
9. 6 plasma Vacuum 72 485-8
10. Henry S, McAllister D V, Allen M and Prausnitz M 2000 Microfabricated microneedles: a novel approach to transdermal drug delivery J. Pharm. Sci. 87 922-5
11. Moon S J and Seung S L 2003 Fabrication of microneedle array using inclined LIGA process IEEE Proc. 12th Int. Conf. on Solid State Sensors, Actuators and Microsystem pp 1546-9
12. Maleka C K and Saile V 2004 Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review Microelectron. J. 35 131-43
13. Matsuzuka N, Hirai Y and Tabata O 2004 A novel fabrication process of 3-D microstructures by double exposure in standard deep x-ray lithography Proc. 17th IEEE Int. Conf. on Micro Electro Mechanical Systems MEMS pp 681-4
14. Liu R, Wang X and Zhou Z 2003 Microneedles array for fluid extraction and drug delivery IEEE Proc. Int. Symp. on Micromechatronics and Human Science pp 239-44
15. Brien J O, Hughes P J, Brunet M, Neill B O, Alderman J, Lane B, Riordan A O and Driscoll C O 2001 Advanced photoresist technologies for microsystems J. Micromech. Microeng. 11 353-8
16. Bufetov I A, Bufetova G A and Fedorov V B 1996 Multipoint self-focusing of laser radiation in optical breakdown plasma Proc. SPIE 2800 177-8