High aspect ratio silicon tips field emitter array

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 613-619

  Rangelow, I W ^a   Biehl, S ^b  

^a UNIVERSITY OF KASSEL   (Germany)

^b u Sen Mikrosystemtechnik   (Germany)

Author keywords

Field emitter array; High aspect ratio; Silicon tips

Indexed keywords

ASPECT RATIO; DIAMOND LIKE CARBON FILMS; DRY ETCHING; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SINGLE CRYSTALS;

FIELD EMITTER ARRAYS;

SEMICONDUCTING SILICON;

EID: 18144443735     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00492-0     Document Type: Article

References (17)