Fast three-dimensional nanostructure fabrication by laser-assisted nanotransfer printing

Applied Physics Letters

Volumn 89, Issue 11, 2006, Pages

  Le Drogoff, B ^a   Cui, B ^a   Veres, T ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ETCHING; LASER PULSES; MASKS; MELTING; PHOTOLITHOGRAPHY; QUARTZ; SUBSTRATES;

ETCH MASK; NANODOTS; NANOTRANSFER PRINTING TECHNIQUE;

NANOSTRUCTURED MATERIALS;

EID: 33748676880     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2347693     Document Type: Article

References (4)

1. J. Bohandy, B. F. Kim, and F. J. Adrian, J. Appl. Phys. 60, 1538 (1986).
2. M. von Allmen and A. Blattner, Laser-Beam Interaction with Materials: Physical Principles and Applications, Springer Series in Materials Science Vol. 2, 2nd ed. (Springer, Berlin, 1995), p. 166.
3. S. K. Lee, W. S. Chang, and S. J. Na, J. Appl. Phys. 86, 4282 (1999).
4. A. Cros, A. G. Schrott, R. D. Thompson, and K. N. Tu, Appl. Phys. Lett. 48, 1547 (1986).