Fabrication and characterization of silicon micro-funnels and tapered micro-channels for stochastic sensing applications

Sensors

Volumn 8, Issue 6, 2008, Pages 3848-3872

  Archer, Marie J ^a   Ligler, Frances S ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Anisotropic etching; Silicon; Stochastic sensing

Indexed keywords

CONCENTRATED POTASSIUM HYDROXIDE; CROSS SECTIONAL AREA; DEEP REACTIVE ION ETCH; FABRICATION AND CHARACTERIZATIONS; REPRODUCIBILITIES; SENSING APPLICATIONS; STOCHASTIC SENSING; WET ANISOTROPIC ETCHING;

ANISOTROPIC ETCHING; FABRICATION; LITHOGRAPHY; SILICON; SILICON WAFERS; STOCHASTIC SYSTEMS;

SILICON OXIDES;

EID: 47049094037     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s8063848     Document Type: Article

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