Generic technological platform for microfabricating silicon nitride micro- and nanopipette arrays

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2372-2378

  Guenat, O T ^a,b   Generelli, S ^a   Dadras, M ^a   Berdondini, L ^a   De Rooij, N F ^a   Koudelka Hep, M ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b MASSACHUSETTS GENERAL HOSPITAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROMACHINING; OXIDES; PRESSURE EFFECTS; REACTIVE ION ETCHING; THERMOANALYSIS;

MICROPIPETTE; NANOPIPETTE ARRAYS; SACRIFICIAL LAYER; THERMAL OXIDE;

SILICON NITRIDE;

EID: 27944457876     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/020     Document Type: Article

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