Exploiting differential etch rates to fabricate large-scale nozzle arrays with protudent geometry

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 923-930

  Mukhopadhyay, Deepkishore ^a   Ferreira, Placid M ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GEOMETRY; NANOTECHNOLOGY; SCANNING; SILICON NITRIDE;

NANOMETER SCALE; NEAR-FIELD OPTICAL SCANNING; PROTUDENT GEOMETRY;

NOZZLES;

EID: 34247510625     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/011     Document Type: Article

References (21)

1. Cheung K, Kubow T and Lee L P 2002 2nd Ann. Int. Conf. on Microtechnologies in Medicine and Biology (Madison, WA, USA) pp 71-5
2. http://arrayit.com/Products/Printing/
3. Jung M Y, Lyo I W, Kim D W and Choi S S 2000 J. Vac. Sci. Technol. A 18 1333-7
4. Han W, Jafari M A, Danforth S C and Safari A 2002 J. Manuf. Sci. Eng. 124 462-72
5. Morris T E, Murphy M C and Acharya S 2000 Proc. SPIE 4174 58-65
6. Tang K, Lin Y, Matson D W, Kim T and Smith R D 2001 Anal. Chem. 73 1658-63
7. Bassous E, Taub H H and Kuhn L 1977 Appl. Phys. Lett. 31 135-7
8. Yuan S, Zhou Z, Wang G and Liu C 2003 Micoelectron. Eng. 66 767-72
9. Kuoni A, Boillat M and de Rooji N F 2003 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Boston, MA) vol 1 pp 372-5
10. Anagnostopoulos C N, Chwalek J M, Delametter C N, Hawkins G A, Jeanmarie D L, Lebens J A, Lopez A and Trauernicht D P 2003 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems (Boston, MA) vol 1 pp 368-71
11. Smith J T, Viglianti B L and Reichert W M 2002 Langmuir 18 6289-93
12. Farooqui M M and Evans A G R 1992 J. Microelectromech. Syst. 1 86-8
13. Smith L, Soderbarg A and Bjorkengren U 1993 Sensors Actuators A 43 311-6
14. Wang S, Zeng C, Lai S, Juang Y, Yang Y and Lee J L 2005 Adv. Mater. 17 1182-6
15. Lewis J A and Gratson G A 2004 Mater. Today 7 32-9
16. Bean K E 1978 IEEE Trans. Electron Devices 25 1185-93
17. Williams K R and Muller R S 1996 J. Microelectromech. Syst. 5 256-69
18. Williams K R, Gupta K and Wasilik M 2003 J. Microelectromech. Syst. 12 761-78
19. www.latech.edu/tech/engr/bme/gale_classes/biomems/dry%20etching.pdf
20. MacDonald N C 1996 Microelectron. Eng. 32 49-73
21. Suryavanshi A P and Yu M 2006 Appl. Phys. Lett. 88 083103