Local oxidation of titanium films by non-contact atomic force microscopy

Microelectronic Engineering

Volumn 85, Issue 7, 2008, Pages 1616-1623

  Fang, Te Hua ^a   Wang, Tong Hong ^b   Wu, Kuan Te ^c  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b ADVANCED SEMICONDUCTOR ENGINEERING INC   (Taiwan)

^c SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Atomic force microscopy; Auger electron spectroscopy; Carbon nanotube probe; Electrochemical nanolithography

Indexed keywords

AMPLITUDE MODULATION; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; NANOLITHOGRAPHY; OXIDATION; TITANIUM COMPOUNDS;

ELECTROCHEMICAL NANOLITHOGRAPHY; TIP-SAMPLE DISTANCE;

THIN FILMS;

ANODIZATION; LITHOGRAPHY;

EID: 46549090088     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.03.013     Document Type: Article

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