Nanooxidation using a scanning probe microscope: An analytical model based on field induced oxidation

Applied Physics Letters

Volumn 70, Issue 24, 1997, Pages 3272-3274

  Stievenard D ^a   Fontaine, P A ^a   Dubois, E ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; OXIDATION; POLARIZATION; PROBES; SCANNING TUNNELING MICROSCOPY;

FIELD INDUCED OXIDATION; NANOOXIDATION; OXIDE HEIGHT; SCANNING PROBE MICROSCOPE;

SEMICONDUCTING SILICON;

EID: 0031161949     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118425     Document Type: Article

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