Local oxidation of titanium thin films using an atomic force microscope under static and pulsed voltages

Journal of Physics D: Applied Physics

Volumn 37, Issue 9, 2004, Pages 1357-1361

  Shen, Ziyong ^a   Hou, Shimin ^a   Sun, Hui ^a   Zhao, Xingyu ^a   Xue, Zengquan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTRIC POTENTIAL; FABRICATION; MASKS; OPTIMAL CONTROL SYSTEMS; OXIDATION; TITANIUM;

PULSED VOLTAGES; STATIC VOLTAGES;

THIN FILMS;

EID: 2442477710     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/9/009     Document Type: Article

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