Application of AFM in microscopy and fabrication of micro/nanostructures

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 352-355

  Lopour, F ^a   Kalousek, R ^a   Skoda D ^a   Spousta, J ^a   Matejka F ^b   Sikola T ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

AFM fabrication; Local anodic oxidation; Oxide nanostructures

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; ATOMS; ETCHING; GOLD; ION BEAMS; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SILICON; THIN FILMS;

LOCAL ANODIC OXIDATION; NANOELECTRIC DEVICE; OXIDE NANOSTRUCTURE; TITANIUM THIN FILM;

MICROSTRUCTURE;

EID: 0036692754     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1315     Document Type: Conference Paper

References (5)