On the heating mode transition in high-frequency inductively coupled argon discharge

Physics of Plasmas

Volumn 6, Issue 2, 1999, Pages 614-618

  Seo, Sang Hun ^a   Hong, Jung In ^a   Bai, Keun Hee ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001661098     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873206     Document Type: Article

References (18)

1. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 3, 169 (1994).
2. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
3. J. Hopwood, C. R. Guarnieri, S. J. Whitehair, and J. J. Cuomo, J. Vac. Sci. Technol. A 11, 152 (1993).
4. M. S. Barnes, J. C. Forster, and J. H. Keller, Appl. Phys. Lett. 62, 2622 (1993).
5. J. Hopwood, Appl. Phys. Lett. 62, 940 (1993).
6. J. A. O'Neil, M. S. Barnes, and J. H. Keller, J. Appl. Phys. 73, 1621 (1993).
7. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), p. 387.
8. J. Hopwood, Plasma Sources Sci. Technol. 1, 109 (1992).
9. G. G. Lister and M. Cox, Plasma Sources Sci. Technol. 1, 67 (1992).
10. J. W. Denneman, J. Phys. D 23, 293 (1990).
11. K. Chandrakar, J. Phys. D 11, 1809 (1978).
12. J. Amorim, H. S. Maciel, and J. P. Sudano, J. Vac. Sci. Technol. B 9, 362 (1991).
13. U. Kortshagen, N. D. Gibson, and J. E. Lawler, J. Phys. D 29, 1224 (1996).
14. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
15. G. R. Branner, E. M. Friar, and G. Medicus, Rev. Sci. Instrum. 34, 231 (1963).
16. C. M. Ferreira, L. L. Alves, M. Pinheiro, and A. B. Sa, IEEE Trans. Plasma Sci. 19, 229 (1991).
17. S. Takamura, Phys. Lett. A 133, 312 (1988).
18. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 4, 332 (1995).