Transition from electrostatic-to-electromagnetic mode in a radio-frequency Ar inductively coupled plasma in atmospheric pressure

Journal of Applied Physics

Volumn 95, Issue 2, 2004, Pages 427-433

  Razzak, M Abdur ^a   Kondo, Kenji ^a   Uesugi, Yoshihiko ^a   Ohno, Noriyasu ^a   Takamura, Shuichi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; ELECTRONS; ELECTROSTATICS; IGNITION; IMAGING TECHNIQUES; IONIZATION; KINETIC ENERGY; PLASMA HEATING; PRESSURE EFFECTS;

ELECTROSTATIC DISCHARGES; THERMAL PLASMAS;

INDUCTIVELY COUPLED PLASMA;

EID: 0742285737     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1635650     Document Type: Article

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