Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

Review of Scientific Instruments

Volumn 68, Issue 6, 1997, Pages 2381-2383

  Eng, K ^a   Strohmaier, K ^a   Palmer, R ^a   Stoner, B ^a,b   Washburn, S ^a  

^a The University of North Carolina at Chapel Hill   (United States)

^b Kobe Stl Electron Mat Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHEMICAL VAPOR DEPOSITION; DETECTORS; DIELECTRIC MATERIALS; ELECTRIC BREAKDOWN; ELECTRIC COILS; NUMERICAL METHODS; PLASMA DENSITY; SPECTROMETERS;

INDUCTIVELY COUPLED PLASMA; PLASMA PROCESSING;

ANTENNAS;

EID: 0031162712     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148121     Document Type: Review

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