Modeling and simulation of the interface temperature between a heated silicon tip and a substrate

Nanoscale and Microscale Thermophysical Engineering

Volumn 12, Issue 1, 2008, Pages 98-115

  Nelson, Brent A ^a   King, William P ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Atomic force microscope; Boundary scattering; Point contact; Thermal resistance

Indexed keywords

(PL) PROPERTIES; AMBIENT ENVIRONMENTS; ANALYTICAL MODELLING; APPLICATION DEVELOPMENT; ATOMIC FORCE MICROSCOPE (AFM); CONTACT FORCES; CONTACT IMPEDANCE; DIMENSIONLESS PARAMETERS; FINITE DIFFERENCE (FD) SIMULATIONS; HEAT TRANSPORT; INTERFACE TEMPERATURES; INTERFACIAL CONTACTS; SILICON TIPS; SUBSTRATE INTERFACES; TIP APEX;

EXTREME ULTRAVIOLET LITHOGRAPHY; FINITE DIFFERENCE METHOD; GEOMETRY; HEALTH; HEAT RESISTANCE; HEAT TRANSFER; THERMAL CONDUCTIVITY; THERMAL INSULATING MATERIALS; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THERMOELECTRICITY;

SUBSTRATES;

EID: 46249125319     PISSN: 15567265     EISSN: None     Source Type: Journal    
DOI: 10.1080/15567260701866769     Document Type: Article

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