Temperature dependence of the force sensitivity of silicon cantilevers

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 4, 2004, Pages

  Gysin, U ^a   Rast, S ^a   Ruff, P ^a   Meyer, E ^a   Lee, D W ^b   Vettiger, P ^b   Gerber, C ^b  

^a Research Laboratory ^*  (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ARTICLE; FORCE; FRICTION; GEOMETRY; ROOM TEMPERATURE; TEMPERATURE; TEMPERATURE DEPENDENCE; THERMODYNAMICS; YOUNG MODULUS;

EID: 1542344025     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.045403     Document Type: Article

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