Thermomechanical formation of nanoscale polymer indents with a heated silicon tip

Journal of Heat Transfer

Volumn 129, Issue 11, 2007, Pages 1600-1604

  King, William P ^a   Goodson, Kenneth E ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; HEAT TRANSFER; HEATING; MASS TRANSFER; MATHEMATICAL MODELS;

CANTILEVER TEMPERATURE; THERMOMECHANICAL DATA STORAGE; TRANSIENT INDENT FORMATION;

POLYMER FILMS;

ATOMIC FORCE MICROSCOPY; HEAT TRANSFER; HEATING; MASS TRANSFER; MATHEMATICAL MODELS; POLYMER FILMS;

EID: 38149024293     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2764088     Document Type: Article

References (32)

1. Vettiger, P., Cross, G., Despont, M., Drechsler, U., Duerig, U., Gotsmann, B., Haberle, W., Lantz, M., Rothuizen, H., Stutz, R., and Binnig, G., 2002, "The "Millipede"-Nanotechnology Entering Data Storage," IEEE Trans. Nanotechnol., 1, pp. 39-64.
2. Vettiger, P., Despont, M., Drechsler, U., Durig, U., Haberle, W., Lutwyche, M. I., Rothuizen, H. E., Stutz, R., Widmer, R., and Binnig, G. K., 2000, "The "Millipede"-More Than One Thousand Tips for Future AFM Data Storage," IBM J. Res. Dev., 44, pp. 323-340.
3. Binnig, G., Despont, M., Drechsler, U., Häberle, W., Lutwyche, M., Vettiger, P., Marnin, H. J., Chui, B. W., and Kenny, T. W., 1999, "Ultrahigh-Density Atomic Force Microscopy Data Storage With Erase Capability," Appl. Phys. Lett., 76, pp. 1329-1331.
4. Chui, B. W, Stowe, T. D., Ju, Y. S., Goodson, K. E., Kenny, T. W., Mamin, H. J., Terris, B. D., and Ried, R. P., 1998, "Low-Stiffness Silicon Cantilever With Integrated Heaters and Piezoresistive Sensors for High-Density Data Storage," J. Microelectromech. Syst., 7, pp. 69-78.
5. Weber, L., Gmelin, E., and Queisser, H. J., 1989, "Thermal Resistance of Silicon Point Contacts," Phys. Rev. B, 40, pp. 1244-1249.
6. Phelan, P. E., Nakabeppu, O., Itoh, K., Hijikata, K., Ohmori, T., and Tonkoshi, K., 1993, "Heat Transfer and Thermoelectric Voltage at Metallic Point Contacts," J. Heat Transfer, 155, pp. 757-762.
7. Shi, L, and Majumdar, A., 2002, "Thermal Transport Mechanisms at Nanoscale Point Contacts," J. Heat Transfer, 124, pp. 329-337.
8. Nakabeppu, O,, Igeta, M., and Hijikata, K., 1997, "Fxperimental Study on Point-Contact Transport Phenomena Using the Atomic Force Microscope," Microscale, Thermophys. Eng., 1, pp. 201-213.
9. Lutwyche, M. I., Despont, M., Drechsler, U., Durig, U., Hablerle, W., Rothuizen, H., Stutz, R., Widmer, R., Binnig, G. K., and Vettiger, P., 2000, "Highly Parallel Data Storage System Based on Scanning Probe Arrays," Appl, Phys. Lett., 77, pp. 3299-3301.
10. Chui, B. W., Asheghi, M., In, Y. S., Goodson, K. E., Kenny, T. W., and Mamin, H. J., 1999, "Intrinsic-Carrier Thermal Runaway in Silicon Microcantilevers," Microscale Thermophys. Eng., 3, pp. 217-228.
11. Mark, J. E., 1999, Polymer Data Handbook, Oxford University Press, New York.
12. Sverdrup, P. G., Ju, Y. S., and Goodson, K. E., 2001, "Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors," J. Heat Transfer. 123, pp. 130-437.
13. Masters, N., Ye, W., and King, W. P., 2005, "The Impact of Sub-Continuum Gas Conduction on the Sensitivity of Heated Atomic Force Microscope Cantilevers," Phys. Fluids, 17, p, 100615.
14. Schwartz, E. T., and Pohl, R. O., 1989, "Thermal Boundary Resistance," Rev. Mod. Phys., 61, pp. 605-668.
15. Ziman, J. M., 1960, Electrons and Phonons, Oxford University Press, Oxford.
16. Casimir, H. B. G., 1938, "Note on the Conduction of Heat in Crystals," Physica (Amsterdam) 5, pp. 495-500.
17. Kittel, C., 1996, Introduction to Solid State Physics, 7th ed., Wiley, New York.
18. Touloukian, Y. S., 1970, Thermal Conductivity: Nonmetallic Solids, IFY Plenum, New York.
19. Cappella, B., and Dietler, G., 1999, "Force-Distance Curves by Atomic Force Microscopy," Surf. Sci. Rep., 43, pp. 1-104.
20. Sneddon, I. N., 1965, "The Relation Between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile," Int. J. Eng. Sci., 3, pp. 47-57.
21. King, W. P., Kenny, T. W., Goodson, K. E., Cross, G. L. W., Despont, M., Durig, U. T., Rothuizen, H., Binnig, G., and Vettiger, P., 2002, "Design of Atomic Force Microscope Cantilevers for Combined Thermomechanical Writing and Thermal Reading in Array Operation," J. Microelectromech. Syst., 11, pp. 765-774.
22. Roshenow, W. M., and Choi, H. Y., 1961, Heat, Mass, and Momentum Transfer, Prentice-Hail, Englewood Cliffs, NJ.
23. Sheehan, P. E., Whitman, L. J., King, W. P., and Nelson, B. A., 2004, "Nanoscale Deposition of Solid Inks via Thermal Dip Pen Nanolithography," Appl. Phys. Lett., 85, pp. 1589-1591.
24. Nelson, B. A., King, W. P., Laracuente, A., Sheehan, P. E., and Whitman, L. J., 2006, "Direct Deposition of Continuous Metal Nanostructures by Thermal Dip-Pen Nanolithography," Appl. Phys. Lett., 88, p. 033104.
25. King, W. P., 2005, "Design Analysis of Heated Atomic Force Microscope Cantilevers for Nanotopography Measurements," J. Micromech. Microeng., 15, pp. 2441-2449.
26. King, W. P., Kenny, T. W., and Goodson, K. E., 2004, "Comparison of Thermal and Piezoresistive Sensing Approaches for Atomic Force Microscopy Topography Measurements," Appl. Phys. Lett., 85, pp. 2086-2088.
27. Cross, G., Despont, M., Drechsler, U., Dürig, U., Vettiger, P., King, W. P., and Goodson, K. E., 2001, "Thermomechanical Formation and Thermal Sensing of Nanometer-Scale Indentations in PMMA Thin Films for Parallel and Dense AFM Data Storage," Mater. Res. Soc. Symp. Proc., 649, pp. Q2.3.1-Q2.3.7.
28. Ferry, J. D., 1980, Viscoelastic Properties of Polymers, Wiley, New York.
29. Fuchs, K., Friedrich, C., and Weese, J., 1996, "Viscoelastic Properties of Narrow-Distribution Poly(methyl methacrylates)," Macromolecules, 29, pp, 5893-5901.
30. Deen, W. M., 1998, Analysis of Transport Phenomena, Oxford University Press, New York.
31. Terris, B. D., Rishton, S. A., Mamin, H. J., Ried, R. P., and Rugar, D., 1998, "Atomic Force Microscope-Based Data Storage: Track Servo and Wear Study," Appl. Phys. A: Mater. Sci. Process., 66, pp. S809-S813.
32. Mamin, H. J., Ried, R. P., Terris, B. D., and Rugar, D., 1999, "High-Density Data Storage Based on the Atomic Force Microscope," Proc. IEEE, 87, pp. 1014-1027.