Defining nanoscale metal features on an atomically clean silicon surface with a stencil

Nanotechnology

Volumn 19, Issue 28, 2008, Pages

  Linklater, A ^a   Nogami, J ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; ELECTRON OPTICS; IMAGE ENHANCEMENT; IMAGING TECHNIQUES; METALS; MICROSCOPES; MICROSCOPIC EXAMINATION; NONMETALS; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SILICON; SPECTROSCOPIC ANALYSIS; SUBSTRATES; SURFACE PROPERTIES; SURFACES;

(1 1 0) SURFACE; ATOMIC-RESOLUTION IMAGING; EDGE DEFINITION; METAL FEATURES; NANO SCALING; NANO-METER-SCALE; SELF ALIGNED (SA); SI(0 0 1); SILICON (0 0 1) SURFACES; SIMPLE METHODS; SUBSTRATE SURFACES;

SCANNING;

QUANTUM DOT; SILICON;

ARTICLE; MATHEMATICAL MODEL; NANOANALYSIS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY;

EID: 44949134858     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/28/285302     Document Type: Article

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