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Volumn 86, Issue 20, 2005, Pages 1-3

Scanning tunneling microscopy characterization of low-profile crystalline TiSi2 microelectrodes on a Si(111) surface

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RESISTANCE; MICROELECTRODES; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR MATERIALS; SILICON; SILICON WAFERS; SURFACE TREATMENT; THERMAL EFFECTS;

EID: 20844447889     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1922572     Document Type: Article
Times cited : (5)

References (25)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.