Fabrication of four-probe fine electrodes on an atomically smooth Si(100)-2 × 1-H surface

Nanotechnology

Volumn 15, Issue 6, 2004, Pages

  Fujimori, Masaaki ^a   Heike, Seiji ^a   Terada, Yasuhiko ^a   Hashizume, Tomihiro ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; HYDROGENATION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SILICON; THERMAL EFFECTS; THIN FILMS;

INTERCONNECTS; MOLECULAR WIRES; NANOSCALE WIRES;

ELECTRODES;

EID: 3042544804     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/6/002     Document Type: Conference Paper

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