Development of double-cantilever infrared detectors: Fabrication, curvature control and demonstration of thermal detection

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 231-240

  Huang, Shusen ^a   Tao, Hu ^a   Lin, I Kuan ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Curvature; Double cantilever infrared detector; Surface micromachining; Thermal detection

Indexed keywords

DETECTORS; FOCAL PLANE ARRAYS; FOCUSING;

BI MATERIALS; CURVATURE (SORI); INFRA RED (IR) DETECTORS; INFRARED (IR); IR FOCAL PLANE ARRAY (FPA); POST PROCESSING;

IRIDIUM;

EID: 44849090622     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.12.017     Document Type: Article

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