160 × 120 pixels Optically Readable Bimaterial Infrared Detector

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 578-581

  Ishizuya, Tohru ^a   Suzuki, Junji ^a   Akagawa, Keiichi ^a   Kazama, Tsuneyuki ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; COOLING SYSTEMS; INFRARED IMAGING; LIGHT ABSORPTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL SENSORS; THERMOELECTRIC EQUIPMENT;

INFRARED CAMERA; OPTICALLY READABLE BIMATERIAL INFRARED DETECTOR; SURFACE MICROMACHINING WAFER PROCESS; THERMOELECTRIC COOLER;

INFRARED DETECTORS;

EID: 0036124052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Uncooled sensor technology
2. Optically readable radiation-displacement-conversion devices and methods and image-rendering apparatus and methods employing same
3. Two-dimensional micromechanical bimorph arrays for detection of thermal radiation
4. Micro-optomechanical infrared receiver with optical readout-MIRROR
5. Optically readable bi-material infrared detector