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Volumn 62, Issue 16, 2000, Pages 11219-11224
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Stress relaxation in a-Si induced by ion bombardment
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Author keywords
[No Author keywords available]
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Indexed keywords
ION;
SILICON;
ARTICLE;
ATOM;
MOLECULAR DYNAMICS;
SIMULATION;
STRESS;
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EID: 0034667145
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevB.62.11219 Document Type: Article |
Times cited : (21)
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References (30)
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