Nanotribology of ultrathin a:SiC/SiC-N overcoats using a depth sensing nanoindentation multiple sliding technique

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 340-344

  Scharf, Thomas W ^a   Barnard, John A ^a  

^a University of Alabama   (United States)

Author keywords

Adhesion; Nanoindentation; Nanotribology; Ultrathin overcoats

Indexed keywords

AMORPHOUS FILMS; FILM GROWTH; FRICTION; MAGNETRON SPUTTERING; RESIDUAL STRESSES; SILICON CARBIDE; SINGLE CRYSTALS; SPUTTER DEPOSITION; SUBSTRATES; TRIBOLOGY; WEAR RESISTANCE;

NANOINDENTATION MULTIPLE SLIDING TECHNIQUE;

ULTRATHIN FILMS;

EID: 0031250203     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00568-3     Document Type: Article

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