Nanoindentation on AlGaN thin films

Journal of Applied Physics

Volumn 86, Issue 12, 1999, Pages 6773-6778

  Caceres D ^a   Vergara, I ^a   Gonzalez R ^a   Monroy, E ^b   Calle, F ^b   Munoz E ^b   Omnes F ^c  

^a UNIVERSIDAD CARLOS III DE MADRID   (Spain)

^b UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^c CRHEA CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037658394     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371726     Document Type: Article

References (22)

1. N. Mohammad, A. A. Salvador, and H. Morkoç, Proc. IEEE 83, 1306 (1995).
2. S. Nakamura, T. Mukai and M. Senoh, Appl. Phys. Lett. 64, 1687 (1994).
3. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto, and H. Kiyoku, Appl. Phys. Lett. 69, 4056 (1996).
4. M. Razeghi and A. Rogalsky, J. Appl. Phys. 79, 7433 (1996).
5. M. S. Shur, Solid-State Electron. 42, 2131 (1998).
6. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7-6, 1564 (1992).
7. F. Omnès, N. Marenco, S. Haffouz, H. Lahreche, Ph. De Mierry, B. Beaumont, P. Hageman, E. Monroy, F. Calle, and E. Muñoz, Mater. Sci. Eng., B 59, 401 (1999).
8. E. Monroy, F. Calle, E. Muñoz, and F. Omnès, Appl. Phys. Lett. 74, 3401 (1999).
9. W. C. Oliver, C. J. McHargue, G. C. Farlow, and C. W. White, Mater. Res. Soc. Symp. Proc. 24, 515 (1984).
10. T. F. Page, W. C. Oliver, and C. J. McHargue, J. Mater. Res. 7, 450 (1992).
11. See, for instance, S. P. Timoshenko and J. N. Goodier, Theory of Elasticity (McGraw-Hill, Kogakusha, 1970), p. 413.
12. W. C. Oliver, R. Hutchings, and J. B. Pethica, ASTM STP 889, 90 (1986).
13. D. Lebouvier, P. Gilormini, and E. Felder, Thin Solid Films 172, 227 (1979).
14. T. Y. Tsui, W. C. Oliver, and G. M. Pharr, in Thin Films: Stresses and Mechanical Properties VI. Symposium (Materials Research Society, Pittsburgh, PA, 1997).
15. H. Gao, C. H. Chiu and J. Lee, Int. J. Solids Struct. 29, 2471 (1992).
16. M. F. Doemer and W. D. Nix, J. Mater. Res. 1, 601 (1986).
17. J. Menciík, D. Munz, E. Quant, E. R. Weppelman, and M. V. Swain, J. Mater. Res. 12, 2475 (1997).
18. J. Li, E. T. Thostenon, T. W. Chou, and L. Riester, J. Eng. Mater. Technol. 120, 152 (1998).
19. J. Li, T. W. Chou, Int. J. Solids Struct. 34, 4463 (1997).
20. A. F. Wright, J. Appl. Phys. 82, 2833 (1997).
21. Y. Takagi, M. Ahart, T. Azuhato, T. Sota, K. Suzuki, and S. Nakamura, Physica B 219&220, 547 (1996).
22. R. B. Schwarz, K. Khachaturyan, and E. R. Weber, Appl. Phys. Lett. 70, 1122 (1997).