A MEMS stage for 3-axis nanopositioning

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 1087-1092

  Liu, Xinyu ^a,b   Kim, Keekyoung ^a,b   Sun, Yu ^a,b  

^a IEEE

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

3 axis; MEMS stage; Motion decoupling; Nanopositioning

Indexed keywords

CROSS AXIS MOTION COUPLING; MOTION DECOUPLING; NANOPOSITIONING;

ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; NANOTECHNOLOGY; POSITION CONTROL;

MEMS;

EID: 44449085005     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341760     Document Type: Conference Paper

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