MEMS cantilever beam electrostatic pull-in model

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4593, Issue , 2001, Pages 31-41

  O'Brien, Gary J ^a   Monk, David J ^b   Lin, Liwei ^c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b MOTOROLA INC   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGEBRA; CANTILEVER BEAMS; CAPACITANCE; ELECTROSTATICS; MATHEMATICAL MODELS; POLYSILICON;

MICRO CANTILEVER BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035772542     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448834     Document Type: Article

References (22)

1. H.C. Nathanson, W.E. Newel, R.A. Wickstrom, and J.R. Davis, "The Resonant Gate Transistor", IEEE Transactions on Electron Devices, vol. ED-14, no. 3, pp. 117-133, 1967.
2. K.E. Petersen, "Dynamic Micromechanics on Silicon, Techniques and Devices", IEEE Transaction on Electron Devices, vol. ED-25, no. 10, pp 1241-1250, 1978.
3. R.T. Howe, "Applications of Silicon Micromachining to Resonator Fabrication", IEEE International Frequency Control Symposium, pp. 2-7, 1994.
4. W.C. Tang, C.T. Nguyen, M. Judy, and R.T. Howe, "Electrostatic Comb Drive of Lateral Polysilicon Resonators", Sensors and Actuators, vol. A21, pp. 328-331, 1990.
5. R.T. Howe, and R.S. Muller, "Resonant Microbridge Vapor Sensor", IEEE Trans. Electron Devices, ED-33, pp. 499-506, 1986.
6. C.H. Masrangelo, and R.S. Muller, "Fabrication and Performance of a Fully Integrated μ-Pirani Pressure gauge with Digital Readout", IEEE Solid State Sensors and Actuators, Transducers 91, pp. 245-248, 1991.
7. R.K. Gupta, and S. Senturia, "Pull-In Dynamics as a Measure of Absolute Pressure", IEEE MEMS 97, pp. 290-294, 1997.
8. L.J. Ristic, R. Gutteridge, B. Dunn, D. Mietus, and P. Bennett, "Surface Micromachined Polysilicon Accelerometer", IEEE Solid State Sensors and Actuators, Hilton Head, p. 118, 1992.
9. S.J. Sherman, W.K. Tsang, T.A. Core, R.S. Payne, D.E. Quinn, K.H. Chau, J.A. Farash, and S.K. Baum, "A Low Cost Monolithic Accelerometer; Product/Technology Update", IEEE International Electron Devices Meeting, pp. 501-504, 1992.
10. C.T. Nguyen, "High-Q Micromechanical Oscillators and Filters for Communications", IEEE International Symposium on Circuits and Systems, pp. 2825-2828, 1997.
11. K. Wang, and C.T. Nguyen, "High Order Micromechanical Electronic Filters", IEEE MEMS 97, pp. 25-30, 1997.
12. K.E. Petersen, "Micromechanical Membrane Switches on Silicon", IBM Journal of Research and Development, Vol. 23, no. 4, pp. 376-385, 1978.
13. P.M. Zavracky, S. Majumder, and N.E. McGruer, "Micromechanical Switches Fabricated Using Nickel Surface Micromachining", Journal of Micro-electromechanical Systems, vol. 6, pp 3-9, 1997.
14. M.A. Gretillat, Y.J. Yang, E.S. Hung, V. Rabinovich, G.K. Ananthasuresh, N.F. de Rooij, and S.D. Senturia", Nonlinear Electromechanical Behavior of an Electrostatic Microrelay", IEEE MEMS 97, pp. 1141-1144, 1997.
15. W.E. Newell, "Miniaturization of Tuning Forks", Science, vol. 161, pp. 1320-1326, 1968.
16. R. Roark and W. Young, "Roark's Formulas for Stress and Strain", McGraw-Hill, New York, NY, 1989.
17. E.P. Popov, "Mechanics of Materials", Prentice-Hall, Englewood Cliffs, NJ, 1976.
18. G. O'Brien, D.J. Monk, and L. Lin, "Electrostatic Latch and Release; a Theoretical and Empirical Study", ASME Microelectromechanical Systems vol. 2, pp. 19-26, 2000.
19. G. O'Brien, D.J. Monk, and L. Lin, "A Stiction Study Via C-V Plot Electrostatic Actuation/Latching", ASME Microelectromechanical Systems, vol. 1, pp. 275-280, 1999.
20. W.C. Tang, M.G. Lim, and R.T. Howe, "Electrostatic Comb Drive Levitation and Control Method", Journal of Microelectromechanical Systems, Vol. 1, No. 4, 1992.
21. ANSYS™ Version 5.6, "Silicon Beam Suspended Above a Grounded Gate", Coupled Field Analysis Guide, Example 2.11.1, ANSYS, Inc., Cannonsburg, PA. 2001.
22. C.H. Mastrangelo and C.H. Hsu, "Mechanical Stability and Adhesion of Microstructures Under Capillary Forces - Part 1: Basic Theory", Journal of Micro-electromechanical Systems, Vol. 2, No. 1, 1993.