Theory and simulation of viscous damped reflection phase gratings

Journal of Physics D: Applied Physics

Volumn 32, Issue 4, 1999, Pages 412-416

  Furlani, E P ^a  

^a EASTMAN KODAK COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; COMPUTER SIMULATION; DAMPING; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; LIGHT REFLECTION; PERMITTIVITY; SUBSTRATES; TENSILE STRESS; ACTIVATION ENERGY; APPROXIMATION THEORY; MATHEMATICAL MODELS; MICROMACHINING; NUMERICAL ANALYSIS;

ELECTROSTATIC DEFLECTION; GRATING LIGHT VALVE; MICROBEAMS; PIXEL; REFLECTION PHASE GRATINGS; SQUEEZE FILM THEORY; VISCOUS AIR DAMPING; REFLECTIVE MICROBEAMS; VISCOUS DAMPED REFLECTION PHASE GRATINGS;

DIFFRACTION GRATINGS;

EID: 0033068262     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/4/010     Document Type: Article

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