SCOPUS 정보 검색 플랫폼

Volumn 12, Issue 5, 2002, Pages 556-561

Squeeze film damping effect on a MEMS torsion mirror

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; LINEAR EQUATIONS; MATHEMATICAL MODELS; MIRRORS; PERTURBATION TECHNIQUES; PRESSURE DISTRIBUTION; SURFACE ROUGHNESS; THICK FILMS;

GAS RAREFACTION; MODIFIED MOLECULAR GAS FILM LUBRICATION EQUATION; SQUEEZE FILM DAMPING EFFECT; TORSION MIRROR;

MICROELECTROMECHANICAL DEVICES;

EID: 0036732304 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/12/5/307 Document Type: Article

Times cited : (51)

References (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.