Spatially regulated growth of metal oxide thin film onto alkyl monolayer template from aqueous solution containing metal fluoride

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1734-1738

  Shirahata, Naoto ^a,b   Yokogawa, Yoshiyuki ^a   Kameyama, Tetsuya ^a   Hozumi, Atsushi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METAL FLUORIDE; METAL OXIDE THIN FILM; MICROPATTERN; PHOTOMASK;

BONDING; DEPOSITION; ETCHING; FERROMAGNETIC MATERIALS; FLUORIDE MINERALS; MONOLAYERS; MOS DEVICES; SOLUTIONS; TIN COMPOUNDS; TOLUENE; ULTRAVIOLET RADIATION;

THIN FILMS;

EID: 4344658433     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1692231     Document Type: Conference Paper

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