Lithographic patterning of benzoylacetone modified SnO2 and SnO2:Sb thin films

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 184-189

  Kololuoma, Terho ^a   Kärkkäinen, Ari H O ^b   Tolonen, Ari ^b   Rantala, Juha T ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF OULU   (Finland)

Author keywords

Antimony doped tin dioxide; Direct photopatterning; Electrical properties

Indexed keywords

ACETONE; ANNEALING; ANTIMONY; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; IRRADIATION; LITHOGRAPHY; TIN COMPOUNDS; ULTRAVIOLET RADIATION;

MOLAR RATIO;

THIN FILMS;

EID: 0043123444     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00826-5     Document Type: Article

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