Effect of high electronic energy deposition in semiconductors

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 225, Issue 1-2 SPEC. ISS., 2004, Pages 111-128

  Wesch, W ^a   Kamarou, A ^a   Wendler, E ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

Damage formation and annealing; Electronic energy deposition; Semiconductors; Swift heavy ions

Indexed keywords

ANNEALING; DEPOSITION; ENERGY MANAGEMENT; HEAVY IONS; PARAMETER ESTIMATION; PARTICLE ACCELERATORS;

DAMAGE FORMATION AND ANNEALING; ELECTRONIC ENERGY DEPOSITION; ION ENERGIES; SWIFT HEAVY IONS;

SEMICONDUCTOR MATERIALS;

EID: 4344573185     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.04.188     Document Type: Conference Paper

References (60)

1. Proceedings of the Second International Symposium on Swift Heavy Ions in Matter, Bensheim/Darmstadt 1992, Radiat. Eff. Def. Solids 126 (1-4) (1993) Proceedings of the Third International Symposium on Swift Heavy Ions in Matter, Caen 1995, Nucl. Instr. and Meth. B 107-108 (1995) Proceedings of the Fourth International Symposium on Swift Heavy Ions in Matter, Berlin 1998, Nucl. Instr. and Meth. B 146 (1998) Proceedings of the Fifth International Symposium on Swift Heavy Ions in Matter, Giardini Naxos 2002, Nucl. Instr. and Meth. 209 (2003).
2. Proceedings of the Second International Symposium on Swift Heavy Ions in Matter, Bensheim/Darmstadt 1992, Radiat. Eff. Def. Solids 126 (1-4) (1993) Proceedings of the Third International Symposium on Swift Heavy Ions in Matter, Caen 1995, Nucl. Instr. and Meth. B 107-108 (1995) Proceedings of the Fourth International Symposium on Swift Heavy Ions in Matter, Berlin 1998, Nucl. Instr. and Meth. B 146 (1998) Proceedings of the Fifth International Symposium on Swift Heavy Ions in Matter, Giardini Naxos 2002, Nucl. Instr. and Meth. 209 (2003).
3. Proceedings of the Second International Symposium on Swift Heavy Ions in Matter, Bensheim/Darmstadt 1992, Radiat. Eff. Def. Solids 126 (1-4) (1993) Proceedings of the Third International Symposium on Swift Heavy Ions in Matter, Caen 1995, Nucl. Instr. and Meth. B 107-108 (1995) Proceedings of the Fourth International Symposium on Swift Heavy Ions in Matter, Berlin 1998, Nucl. Instr. and Meth. B 146 (1998) Proceedings of the Fifth International Symposium on Swift Heavy Ions in Matter, Giardini Naxos 2002, Nucl. Instr. and Meth. 209 (2003).
4. Proceedings of the Second International Symposium on Swift Heavy Ions in Matter, Bensheim/Darmstadt 1992, Radiat. Eff. Def. Solids 126 (1-4) (1993) Proceedings of the Third International Symposium on Swift Heavy Ions in Matter, Caen 1995, Nucl. Instr. and Meth. B 107-108 (1995) Proceedings of the Fourth International Symposium on Swift Heavy Ions in Matter, Berlin 1998, Nucl. Instr. and Meth. B 146 (1998) Proceedings of the Fifth International Symposium on Swift Heavy Ions in Matter, Giardini Naxos 2002, Nucl. Instr. and Meth. 209 (2003).
5. Toulemonde M., Dufour C., Paumier E. Phys. Rev. B. 46:1992;14362.
6. Miotello A., Kelly R. Nucl. Instr. and Meth. 122:1997;458.
7. Furuno S., Otsu H., Hojou K., Izui K. Nucl. Instr. and Meth. B. 107:1996;223.
8. Vetter J., Scholz R., Angert N. Nucl. Instr. and Meth. B. 91:1994;129.
9. Herre O., Wesch W., Wendler E., Gaiduk P.I., Komarov F.F., Klaumünzer S., Meier P. Phys. Rev. B. 58:1998;4832.
10. Wesch W., Herre O., Gaiduk P.I., Wendler E., Klaumünzer S., Meier P. Nucl. Instr. and Meth. B. 146:1998;341.
11. Gaiduk P.I., Komarov F.F., Tishkov V.S., Wesch W., Wendler E. Phys. Rev. B. 61:2000;15785.
12. Gaiduk P.I., Komarov F.F., Wesch W. Nucl. Instr. and Meth. B. 164-165:2000;377.
13. Szenes G., Horvath Z.E., Pecz B., Paszti F., Toth L. Phys. Rev. B. 65:2002;452061.
14. Gaiduk P.I., Nylandsted Larsen A., Trautmann C., Toulemonde M. Phys. Rev. B. 66:2002;045316.
15. Komarov F.F., Gaiduk P.I., Vlasukova L.A., Dydik A.J., Yuvchenko V.N. Vacuum. 70:2003;75.
16. Dunlop A., Jaskierowicz G., Della-Negra S. Nucl. Instr. and Meth. B. 146:1998;302.
17. Canut B., Bonardi N., Ramos S.M.M., Della-Negra S. Nucl. Instr. and Meth. B. 146:1998;296.
18. Colder A., Marty O., Canut B., Levalois M., Marie P., Portier X., Ramos S.M.M., Toulemonde M. Nucl. Instr. and Meth. B. 174:2001;491.
19. Colder A., Canut B., Levalois M., Marie P., Portier X., Ramos S.M.M. J. Appl. Phys. 91:2002;5853.
20. Biersack J.P., Ziegler J.F. The Stopping and Ranges of Ions in Matter, Vol. 1. 1985;Pergamon, New York.
21. Levalois M., Bogdanski P., Toulemonde M. Nucl. Instr. and Meth. B. 63:1992;14.
22. Bogdanski P., Marie P., Toulemonde M. Nucl. Instr. and Meth. B. 62:1992;388.
23. Levalois M., Girard J.P., Allais G., Hairie A., Metzner M.N., Paumier E. Nucl. Instr. and Meth. B. 63:1992;25.
24. Carin R., Madelon R., Julienne D., Cruege F., Hairie A. Nucl. Instr. and Meth. B. 63:1992;21.
25. Mikou M., Carin R., Bogdanski P., Madelon R. Nucl. Instr. and Meth. B. 107:1996;246.
26. Marie P., Levalois M., Paumier E. J. Appl. Phys. 79:1996;7555.
27. Varichenko V.S., Zaitsev A.M., Kazutchits N.M., Chelyadinskii A.R., Penina N.M., Martinovich V.A., Latushko Ya.I., Fahrner W.R. Nucl. Instr. and Meth. B. 107:1996;268.
28. Mikou M., Carin R., Bogdanski P., Marie P. J. Phys. III France. 7:1997;166.
29. Mangiagalli P., Levalois M., Marie P., Rancoita P.G., Rattaggi M. Nucl. Phys. B (Proc. Suppl.). 61B:1998;464.
30. Levalois M., Marie P. Nucl. Instr. and Meth. B. 156:1999;64.
31. Colder A., Levalois M., Marie P. J. Appl. Phys. 88:2000;3082.
32. Colder A., Levalois M., Marie P. Eur. Phys. J. AP. 13:2001;89.
33. Fage-Pedersen J., Mesli A., Nylandsted Larsen A. Phys. Rev. B. 62:2000;10116.
34. Gärtner K. Nucl. Instr. and Meth. B. 132:1997;147.
35. Zaitsev A.M. Nucl. Instr. and Meth. B. 62:1991;81.
36. Erchak D.P., Efimov V.G. Nucl. Instr. and Meth. B. 69:1992;443.
37. Huber H., Assmann W., Grötzschel R., Mieskes H.D., Mücklich A., Nolte H., Prusseit W. Mater. Sci. Forum. 248-249:1997;301.
38. Wesch W., Wendler E., Bachmann T., Herre O. Nucl. Instr. and Meth. B. 96:1995;290.
39. Wendler E., Opfermann T., Gaiduk P.I. J. Appl. Phys. 82:1997;5965.
40. Wendler E., Opfermann T., Müller P., Wesch W. Nucl. Instr. and Meth. B. 106:1995;303.
41. G. Szenes, private communication.
42. Gibbons J.F. Proc. IEEE. 60:1972;1062.
43. Wang Z.G., Dufour Ch., Paumier E., Toulemonde M. J. Phys.: Condens. Matter. 6:1994;6733.
44. A. Kamarou, W. Wesch, E. Wendler, S. Klaumünzer, Nucl. Instr. and Meth. B, this issue. doi:10.1016/j.nimb.2004.02.031.
45. A. Kamarou et al., to be published.
46. Meftah A., Brisard F., Costantini J.M., Hage-Ali M., Stoquert J.P., Studer F., Toulemonde M. Phys. Rev. B. 48:1993;920.
47. Szenes G. Mater. Sci. Forum. 97-99:1992;647.
48. Szenes G. Phys. Rev. B. 51:1995;8026.
49. Canut B., Ramos S., Bonardi N., Chaumont J., Bernas H., Cottereau E. Nucl. Instr. and Meth. B. 122:1997;335.
50. Canut B., Ramos S. Radiat. Eff. Def. Sol. 145:1998;1.
51. Trinkaus H., Ryazanov A.I. Phys. Rev. Lett. 74:1995;5072.
52. A. Hedler, S. Klaumunzer, W. Wesch, in press.
53. Izui K. J. Phys. Soc. Jpn. 20:1995;915.
54. Noggle T.S., Stiegler J.O. J. Appl. Phys. 33:1962;1726.
55. Merkle K.L. Phys. Rev. Lett. 9:1962;150.
56. Wesch W., Kamarou A., Wendler E., Gärtner K., Gaiduk P.I., Klaumünzer S. Nucl. Instr. and Meth. B. 206:2003;1018.
57. Chadderton L.T. On Track. 10:2000;5.
58. Chadderton L.T., Fink D. Radiat. Eff. Def. Solids. 152:2000;168.
59. Wendt A.S., Vidal O., Chadderton L.T. Earth Planet. Sci. Lett. 6275:2002;1.
60. L.T. Chadderton, Nuclear tracks in solids: registration physics and the compound spike, preprint.