Ion mass and temperature dependence of damage production in ion implanted InP

Journal of Applied Physics

Volumn 82, Issue 12, 1997, Pages 5965-5975

  Wendler, E ^a   Opfermann, T ^a   Gaiduk, P I ^b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000791985     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366499     Document Type: Article

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