Damage induced in semiconductors by swift heavy ion irradiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 156, Issue 1, 1999, Pages 64-71

  Levalois, M ^a   Marie, P ^a  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; HEAVY IONS; ION BOMBARDMENT; PARTICLE DETECTORS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SILICON SENSORS;

SWIFT HEAVY ION IRRADIATION;

RADIATION DAMAGE;

EID: 0032681333     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00243-8     Document Type: Article

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