Micro FET pressure sensor manufactured using CMOS-MEMS technique

Microelectronics Journal

Volumn 39, Issue 5, 2008, Pages 744-749

  Dai, Ching Liang ^a   Kao, Pin Hsu ^a   Tai, Yao Wei ^a   Wu, Chyan Chyi ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

CMOS; FET pressure sensor; MEMS

Indexed keywords

CMOS INTEGRATED CIRCUITS; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; MEMS; PRESSURE SENSORS; SENSITIVITY ANALYSIS;

SENSING CELLS; SUSPENDED MEMBRANES;

FIELD EFFECT TRANSISTORS;

EID: 43049165930     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.12.015     Document Type: Article

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